Stuart, R.V.  x <br/><br/>
Vacum technology, thin films, and sputtering  An introduction 

 - x 
 - Orlandom; London  Academic Press  1983 
 - viii, 151 
<br/><br/>Includes 
<br/><br/><label>ISBN: </label>0126747806 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Vacuum technology Thin films 
<br/><br/><label>Dewey Class. No.: </label>621.55/S932v