TY  - BOOK
AU  - Stuart,R.V., x
AU  - x
TI  - Vacum technology, thin films, and sputtering: An introduction
SN  - 0126747806
U1  - 621.55/S932v 
PY  - 1983///
CY  - Orlandom; London
PB  - Academic Press
KW  - Vacuum technology
KW  - Thin films
N1  - Includes
ER  -