Cambell, Stephen A.  x <br/><br/>
The science and engineerig of microelectronic falsrication  x 

 - 2 
 - New Delhi  Oxford Univ. Press  2003 
 - xiv, 603 
<br/><br/>Includes 
<br/><br/><label>ISBN: </label>0195136055 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors - Design and construction Engineering 
<br/><br/><label>Dewey Class. No.: </label>621.3815/C197s