TY  - BOOK
AU  - Cambell,Stephen A., x
AU  - x
TI  - The science and engineerig of microelectronic falsrication: x
SN  - 0195136055
U1  - 621.3815/C197s 
PY  - 2003///
CY  - New Delhi
PB  - Oxford Univ. Press
KW  - Semiconductors - Design and construction
KW  - Engineering
N1  - Includes
ER  -