Liu, Chang  Mungurwadi, Vaishal B <br/><br/>
Foundations of MEMS   

 - 2ed 
 - New Delhi  Person Education  2012 
 - 576 
<br/><br/>Includes 
<br/><br/><label>ISBN: </label>9788131764756 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics Mechanical engneering 
<br/><br/><label>Dewey Class. No.: </label>621.381/L783f