TY  - BOOK
AU  - Liu,Chang, Mungurwadi, Vaishal B
AU  - 
TI  - Foundations of MEMS
SN  - 9788131764756
U1  - 621.381/L783f 
PY  - 2012///
CY  - New Delhi
PB  - Person Education
KW  - Electronics
KW  - Mechanical engneering
N1  - Includes
ER  -