| 000 | 00564nam a2200217 454500 | ||
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| 001 | 052814 | ||
| 003 | BD-ChCU | ||
| 008 | Eng | ||
| 020 | _a0195136055 | ||
| 040 |
_aDLC _cDLC _dBD-ChCU |
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| 082 | 0 | 0 | _a621.3815/C197s |
| 100 | 1 |
_aCambell, Stephen A. _bx |
|
| 245 | 1 | 0 |
_aThe science and engineerig of microelectronic falsrication _bx |
| 250 | _a2 | ||
| 260 |
_aNew Delhi _bOxford Univ. Press _c2003 |
||
| 300 | _axiv, 603 | ||
| 504 | _aIncludes | ||
| 650 | 0 |
_aSemiconductors - Design and construction _bEngineering |
|
| 700 | 1 | _ax | |
| 942 |
_2ddc _cBK |
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| 999 |
_c52814 _d52814 |
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