| 000 | 00512nam a2200217 454500 | ||
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| 001 | 085714 | ||
| 003 | BD-ChCU | ||
| 008 | Eng | ||
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| 040 |
_aDLC _cDLC _dBD-ChCU |
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| 082 | 0 | 0 | _a621.381/L783f |
| 100 | 1 |
_aLiu, Chang _bMungurwadi, Vaishal B |
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| 245 | 1 | 0 |
_aFoundations of MEMS _b |
| 250 | _a2ed | ||
| 260 |
_aNew Delhi _bPerson Education _c2012 |
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| 300 | _a576 | ||
| 504 | _aIncludes | ||
| 650 | 0 |
_aElectronics _bMechanical engneering |
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| 700 | 1 | _a | |
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_2ddc _cBK |
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