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Vacum technology, thin films, and sputtering An introduction

Stuart, R.V. x

Vacum technology, thin films, and sputtering An introduction - x - Orlandom; London Academic Press 1983 - viii, 151

Includes

ISBN: 0126747806

Subjects--Topical Terms:
Vacuum technology Thin films

Dewey Class. No.: 621.55/S932v

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