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The science and engineerig of microelectronic falsrication x

Cambell, Stephen A. x

The science and engineerig of microelectronic falsrication x - 2 - New Delhi Oxford Univ. Press 2003 - xiv, 603

Includes

ISBN: 0195136055

Subjects--Topical Terms:
Semiconductors - Design and construction Engineering

Dewey Class. No.: 621.3815/C197s

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